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Stable and Corrosion-Resistant Sapphire Capacitive Pressure Sensor for High
[2010-12-31]
Kimura, Y. Ishikura, T. Kataoka, M. Soeda, T. Masuda, Y.Yoshikawa, M. Nagata,
Stable and Corrosion-Resistant Sapphire Capacitive Pressure Sensor for High Temperature and Harsh Environments
Transducers ’0 1, June, 200 1, pp.518-521
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