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Precise Test of the Diffusion-Controlled Wet Isotropic Etching of Silicon v [2012-05-29] |
| Precise Test of the Diffusion-Controlled Wet Isotropic Etching of Silicon via Circular Mask Openings J. Electrochem. Soc., Volume 153, Issue 9, pp. C641-C647 (2006) V. B. Svetovoy, J. W. Berenschot, and M. C. Elwenspoek 附件下载 |
