Mechanical effects of galvanic corrosion of thin film polysilicon
作者: Miller, DC; Gall, K; Stoldt, CR
会议信息: ASME International Mechanical Engineering Congress and Exposition, 日期: NOV 05-11, 2005 Orlando FL
来源出版物: Micro-Electro-Mechanical Systems - 2005   卷: 7   页: 325-334   出版年: 2005