The Fabrication Of Insulating Layer On 4H-SiC By Hot Wire Nitridation
Chen, C (Chen, C.)1; Sengoku, A (Sengoku, A.)1; Shiozawa, H (Shiozawa, H.)1; Suzuki, S (Suzuki, S.)1; Nonami, T (Nonami, T.)1; Yamakami, T (Yamakami, T.)1; Hayashibe, R (Hayashibe, R.)1; Kamimura, K (Kamimura, K.)1
Rusop, M; Soga, T
AIP Conference Proceedings 卷: 1136 页: 114-117 出版年: 2009