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Fiber optic Fabry-Perot pressure sensor with the Si3N 4/SiO2/Si3N4 diaphrag [2009-08-05] |
| 标题: Fiber optic Fabry-Perot pressure sensor with the Si3N 4/SiO2/Si3N4 diaphragm fabricated using micromachining technology 作者: Myung-Gyoo Kim; Jaehee Park; Shin-Won Kang, et al. 会议信息: Smart Electronics and MEMS, 日期: Adelaide, SA Australia 来源出版物: Proceedings of the SPIE - The International Society for Optical Engineering|Proceedings of the SPIE - The International Society for Optical Engineering 卷: vol.3242 页: 347-53 出版年: 1997 附件下载 |
