|
A roadmap to a technological platform for integrating nanophotonic structur [2009-11-03] |
A roadmap to a technological platform for integrating nanophotonic structures
with micromechanical systems in silicon-on-insulator
Proc. SPIE, Vol. 5956, 59560H (2005); doi:10.1117/12.622442
附件下载
|
