Influence of different depositionparameters on the properties ofhydrogenatedamorphoussilicon films prepared by magnetronsputtering
Journal of Non-Crystalline Solids
Volume 103, Issue 1, 2 June 1988, Pages 143–148
Debajyoti Das,  Ratnabali Banerjee,  A.K. Batabyal,  A.K. Barua