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Preparation of lowdefectgrade a-Si:H films by RF magnetron sputtering techn [2012-04-06] |
| Preparation of lowdefectgrade a-Si:H films by RF magnetron sputtering technique W. Müller, J. Pirrung, B. Schröder, J. Geiger Solar Energy Materials Volume 10, Issue 2, June–July 1984, Pages 171–186 Fachbereich Physik, Universität Kaiserslautern, D-6750 Kaiserslautern, Fed. Rep. Germany Received 12 January 1984. Available online 3 March 2003 附件下载 |
