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Fabrication of GaSb Microlenses by Photo and E-Beam Lithography and Dry Etc
[2012-08-31]
Fabrication of GaSb Microlenses by Photo and E-Beam Lithography and Dry Etching
Journal Solid State Phenomena (Volumes 99 - 100)
Volume Functional Nanomaterials for Optoelectronics and other Applications
Edited by Witold Lojkowski and John R. Blizzard
Pages 83-88
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