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Fabrication of Non-Underetched Convex Corners in Anisotropic Etching of (10 [2010-03-26] |
| 题目：Fabrication of Non-Underetched Convex Corners in Anisotropic Etching of (100)-Silicon in Aqueous KOH with Respect to Novel Micromechanic Elements 作者：G. K. Mayer, H. L. Offereins, H. Sandmaier, and K. Kühl 来源：J. Electrochem. Soc., Volume 137, Issue 12, pp. 3947-3951 (1990) 附件下载 |
