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Very high crystalline quality of thick 4H-SiC epilayers grown from methyltr [2012-02-03] |
| Very high crystalline quality of thick 4H-SiC epilayers grown from methyltrichlorosilane (MTS) Pedersen H.; Leone S.; Henry A.; PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS 卷: 2 期: 4 页: 188-190 DOI: 10.1002/pssr.200802081 出版年: AUG 2008 附件下载 |
