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Plasma deposition of cubic boron nitride films from non-toxic material [2011-09-28] |
| Plasma deposition of cubic boron nitride films from non-toxic material at low temperatures M.Z. Karim, D.C. Cameron, M.J. Murphy, M.S.J. Hashmi Surface and Coatings Technology Volume 49, Issues 1-3, 10 December 1991, Pages 416-421 附件下载 |
