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Crystal recovery from Al-implantation induced damaging in 3C-SiC films [2012-09-24] |
| 标题: Crystal recovery from Al-implantation induced damaging in 3C-SiC films 作者: Severino, Andrea; Piluso, Nicolo; Marino, Antonio; 等. 来源出版物: PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS 卷: 6 期: 5 页: 226-228 DOI: 10.1002/pssr.201206064 出版年: MAY 2012 附件下载 |
