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Etching Profiles at Resist Edges [2012-05-29] |
Etching Profiles at Resist Edges
J. Electrochem. Soc., Volume 133, Issue 6, pp. 1217-1226 (1986)
H. K. Kuiken, J. J. Kelly, and P. H. L. Notten Philips
Research Laboratories, 5600 JA Eindhoven, The Netherlands
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