首 页 >> 单篇全文
In situ S-doping of cubic boron nitride thin films by plasma enhanced chemi [2011-02-28] |
| In situ S-doping of cubic boron nitride thin films by plasma enhanced chemical vapor deposition Yang HS, Kurebayashi N, Yoshida T Materials Science Forum 卷: 638-642 页: 2956-2961 子辑: Part 1-4 出版年: 2010 附件下载 |
