SiON high-refractive-index waveguide and planar lightwave circuits
IBM Journal of Research and Development
Date of Publication: March 2003
Author(s): Bona, G.-L.
IBM Research Division, Zurich Research Laboratory, CH-8803 Rüschlikon, Switzerland
Germann, R. ;  Offrein, B. J.
Volume: 47 , Issue: 2.3
Page(s): 239 - 249