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Large Scale Engineered Nanostructured Surfaces by Reactive Ion Etching with
[2010-10-08]
Large Scale Engineered Nanostructured Surfaces by Reactive Ion Etching with Kinetically Self-Assembled Non-continuous Metal Film as Etching Mask
W. Wei, M. Bachman, and G.-P. Li, Mater. Res. Soc. Symp. Proc. 849, KK8.6 (2005).

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