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Rapid thermal oxidation of heavily doped silicon for advanced solar cell pr [2011-06-30] |
| Rapid thermal oxidation of heavily doped silicon for advanced solar cell processing 作者: Sivoththaman S, Laureys W, Nijs J, Mertens R 编者: Brueck SRJ; Gelpey JC; Kermani A; Regolini JL; Sturm JC 来源出版物: RAPID THERMAL AND INTEGRATED PROCESSING IV 丛书: MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS 卷: 387 页: 259-264 出版年: 1995 附件下载 |
