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Highly enhanced ferroelectricity in HfO2-based ferroelectric thin film by light ion bombardment
[2022-05-16]

Highly enhanced ferroelectricity in HfO2-based ferroelectric thin film by light ion bombardment

SCIENCE • 12 May 2022 • Vol 376, Issue 6594 • pp. 731-738 • DOI: 10.1126/science.abk3195

Highly enhanced ferroelectricity in HfO2-based ferroelectric thin film by light ion bombardment.pdf