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Pore formation in silicon by wet etching using micrometre-sized metal parti [2012-10-13] |
| Pore formation in silicon by wet etching using micrometre-sized metal particles as catalysts Chia-Lung Lee , Kazuya Tsujino , Yuji Kanda , Shigeru Ikeda and Michio Matsumura J. Mater. Chem., 2008,18, 1015-1020 附件下载 |
