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Development of SiNx LPCVD processes for microtechnological applications [2009-10-21] |
Development of SiNx LPCVD processes for microtechnological applications
B.Rousset, L.Furgal, P.Fadel, A.Fulop, D.Pujos and P.Temple-Boyer
JOURNAL DE PHYSIQUE IV
Vol.11 (2001) P.Pr3 p.937-944
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