首 页 >> 单篇全文
The Electrical Performances and Leakage Current Conduction Mechanism of Al2O3/ZrO2/SiO2/ZrO2/Al2O3 MIM Capacitors
[2021-09-19]

The Electrical Performances and Leakage Current Conduction Mechanism of Al2O3/ZrO2/SiO2/ZrO2/Al2O3 MIM Capacitors

Q. X. Zhang

Integrated Ferroelectrics

An International Journal

Volume 217, 2021 - Issue 1: Proceedings of the Nineteenth China International Nanoscience and Technology Symposium (CINSTS20), Part III of V

The Electrical Performances and Leakage Current Conduction Mechanism of Al2O3_ZrO2_SiO2_ZrO2_Al2O3 MIM Capacitors.pdf