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Compensation structures for convex corner micromachining in silicon [2011-06-16] |
| Compensation structures for convex corner micromachining in silicon B. Puersa and W. Sansena Sensors and Actuators A: Physical Volume 23, Issues 1-3, April 1990, Pages 1036-1041 Proceedings of the 5th International Conference on Solid-State Sensors and Actuators and Eurosensors III 附件下载 |
