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Mass-Spectrometry of a Silane Glow-Discharge during Plasma Deposition of a- [2011-06-22] |
Turban, G., Y. Catherine, and B. Grolleau,
Mass-Spectrometry of a Silane Glow-Discharge during Plasma Deposition of a-Si-H Films.
Thin Solid Films, 1980. 67(2): p. 309-320
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