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DLTS characterization of N-type silicon after rapid thermal annealing of bo [2012-08-13] |
| DLTS characterization of N-type silicon after rapid thermal annealing of boron implantation 作者: Ransom, C.M.; Sedgwick, T.O.; Cohen, S.A. MRS Proceedings / Volume 52 / 1985 DOI: http://dx.doi.org/10.1557/PROC-52-153 附件下载 |
