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Nanostructure fabrication in InP and related compounds
[2021-04-12]

Nanostructure fabrication in InP and related compounds

Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena 8, 1357 (1990)

I. Adesida, K. Nummila, E. Andideh, and J. Hughes

Nanostructure fabrication in InP and related compounds.pdf