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Properties of mixed-phase BN films deposited by r.f. PACVD
[2011-09-28]
Properties of mixed-phase BN films deposited by r.f. PACVD
D.C. Cameron, M.Z. Karim, M.S.J. Hashmi
Thin Solid Films
Volume 236, Issues 1-2, 15 December 1993, Pages 96-102

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