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High Temperature Annealing SP-AlN Ameliorates the Crystal Quality ofAl0.5Ga0.5N Regrowth
[2020-11-23]

High Temperature Annealing SP-AlN Ameliorates the Crystal Quality ofAl0.5Ga0.5N Regrowth

Materials Science Forum (Volume 1014)

Min Lu

Pages:14-21

DOI:https://doi.org/10.4028/www.scientific.net/MSF.1014.14

November 2020

High Temperature Annealing SP-AlN Ameliorates the Crystal Quality ofAl0.5Ga0.5N Regrowth.pdf