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PLASMA TEOS AS AN INTERMETAL DIELECTRIC IN 2 LEVEL METAL TECHNOLOGY [2013-01-16] |
题目：PLASMA TEOS AS AN INTERMETAL DIELECTRIC IN 2 LEVEL METAL TECHNOLOGY
作者：G. W. Hills, A. S. Harrus and M. J. Thoma
来源出版物: SOLID STATE TECHNOLOGY 卷: 33 期: 4 页: 127-132 出版年: APR 1990
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