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Citric acid etching of GaAs1-xSbx, Al0.5 Ga0.5Sb, and InAs for heterostruct [2010-07-07] |
Citric acid etching of GaAs1-xSbx, Al0.5 Ga0.5Sb, and InAs for heterostructure device fabrication,
来源出版物: Journal of the Electrochemical Society 卷: 141 期: 12 页: 3526-31 出版年: December 1994
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