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Chemical Vapor Deposition of Single Crystalline β-SiC Films on Silicon Subs [2012-01-09] |
Chemical Vapor Deposition of Single Crystalline β-SiC Films on Silicon Substrate with Sputtered SiC Intermediate Layer
J. Electrochem. Soc., Volume 127, Issue 12, pp. 2674-2680 (1980)
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