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Removal of Anodic Aluminum Oxide Barrier Layer on Silicon Substrate by usin [2011-06-01] |
| Title:Removal of Anodic Aluminum Oxide Barrier Layer on Silicon Substrate by using Cl-2/BCl3 Neutral Beam Etching Authors:Yeon, JK; Lim, WS; Park, JB; Kwon, NY; Kim, SI; Min, KS; Chung, IS; Kim, YW; Yeom, GY Source:OURNAL OF THE ELECTROCHEMICAL SOCIETY 158 (5): D254-D258 2011 附件下载 |
