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A Study of the Silane Glow-Discharge Deposition by Isotopic Labeling
[2011-06-22]
Turban, G., Y. Catherine, and B. Grolleau,
A Study of the Silane Glow-Discharge Deposition by Isotopic Labeling.
Thin Solid Films, 1981. 77(4): p. 287-300
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