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Femtosecond and Nanosecond Laser Pulse Crystallization of Thin a-Si:H Films [2011-10-06] |
Femtosecond and Nanosecond Laser Pulse Crystallization of Thin a-Si:H Films on Non-Refractory Glass Substrates Journal Solid State Phenomena (Volumes 131 - 133) Volume Gettering and Defect Engineering in Semiconductor Technology XII Edited by A. Cavallini, H. Richter, M. Kittler and S. Pizzini Pages 479-484 DOI 10.4028/www.scientific.net/SSP.131-133.479 附件下载 |