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Amorphous silicon and silicon germanium alloy solar cells deposited by VHF
[2010-01-04]
Amorphous silicon and silicon germanium alloy solar cells deposited by VHF at high rates
Yang, Jeffrey (United Solar Systems Corp., 1100 West Maple Road, Troy, MI 48084,
 United States); Yan, Baojie; Smeets, Jozef; Guha, Subhendu
Source: Materials Research Society Symposium - Proceedings, v 664, p A1131-
A1136, 2001
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