首 页 >> 单篇全文
Electrostaticallydrivenvacuum-encapsulatedpolysiliconresonators Part I. [2011-09-23] |
| Electrostaticallydrivenvacuum-encapsulatedpolysiliconresonators Part I. Design and fabrication Rob Legtenberg, Harrie A.C. Tilmans1 Sensors and Actuators A: Physical Volume 45, Issue 1, October 1994, Pages 57-66 附件下载 |
