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Highly Purified Silane Gas for Advanced Silicon Semiconductor Devices [2012-12-04] |
Highly Purified Silane Gas for Advanced Silicon Semiconductor Devices
Atsushi Ohkia, Tadahiro Ohmia, Junichi Dateb and Takahiko Kijimab
J. Electrochem. Soc. 1998 145(10): 3560-3569;
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