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In-situ doping of LPCVD poly silicon (II). Temperature influence [2012-02-28] |
| In-situ doping of LPCVD poly silicon (II). Temperature influence Dr. H. Kühne1, P. Puk1, M. Gericke2, Prof. Dr. W. Bertoldi1Article first published online: 19 FEB 2006 Crystal Research and Technology Volume 25, Issue 5, pages 497–503, May 1990 附件下载 |
