CLAMPING LOSSES OF FOLDED- AND STRAIGHT-BEAM MEMS RESONATORS MADE FROM POLYCRYSTALLINE 3C-SiC FILMS 
作者: Chang, WT (Chang, Wen-Teng) 
来源出版物: INTERNATIONAL JOURNAL OF MODERN PHYSICS B  卷: 25   期: 6   页: 885-896   DOI: 10.1142/S0217979211057980   出版年: MAR 10 2011