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Stress compensation techniques in thin layers applied to silicon micromachi [2010-11-02] |
| 标题: Stress compensation techniques in thin layers applied to silicon micromachining 作者: Lang, W.; Muck, G.; Rose, E., et al. 会议信息: Amorphous Insulating Thin Films Symposium, 日期: Boston, MA USA 来源出版物: Amorphous Insulating Thin Films Symposium|Amorphous Insulating Thin Films Symposium 页: 119-25|xii+636 出版年: 1993 附件下载 |
