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Reactive Ion Etching of Benzocyclobutene Using a Silicon Nitride Dielectric [2011-11-28] |
Reactive Ion Etching of Benzocyclobutene Using a Silicon Nitride Dielectric Etch Mask
Michael Schier
J. Electrochem. Soc., Volume 142, Issue 9, pp. 3238-3240 (1995)
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