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Experimental observations and modeling of ultra‐shallow BF2 and As implants in single‐crystal silicon [2020-04-24] |
| Experimental observations and modeling of ultra‐shallow BF2 and As implants in single‐crystal silicon, A. F. Tasch, S. H. Yang, S. Morris, and D. Lim, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 12, 166 (1994) |
