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Polycrystalline and amorphous silicon micromechanical beams: annealing and [2012-04-01] |
| Polycrystalline and amorphous silicon micromechanical beams: annealing and mechanical properties 作者: Howe R.T.; Muller R.S. 来源出版物: Sensors and Actuators 卷: 4 期: 3 页: 447-54 DOI: 10.1016/0250-6874(83)85056-2 出版年: Nov. 1983 附件下载 |
