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Micromachined Fabry-Perot cavity pressure transducer with optical fiber int [2009-08-10] |
标题: Micromachined Fabry-Perot cavity pressure transducer with optical fiber interconnects 作者: Youngmin Kim; Neikirk, D.P. 会议信息: Micromachined Devices and Components, 日期: 来源出版物: Proceedings of the SPIE - The International Society for Optical Engineering|Proceedings of the SPIE - The International Society for Optical Engineering 卷: vol.2642 页: 242-9 出版年: 1995 附件下载 |