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Micromachined Fabry-Perot cavity pressure transducer with optical fiber int
[2009-08-10]
标题: Micromachined Fabry-Perot cavity pressure transducer with optical fiber interconnects
作者: Youngmin Kim; Neikirk, D.P.
会议信息: Micromachined Devices and Components, 日期: Austin, TX USA
来源出版物: Proceedings of the SPIE - The International Society for Optical Engineering|Proceedings of the SPIE - The International Society for Optical Engineering   : vol.2642   : 242-9   出版年: 1995
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