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Challenges in large-area multi-wafer SiC epitaxy for production needs [2009-09-23] |
| Challenges in large-area multi-wafer SiC epitaxy for production needs 作者: Thomas B (Thomas, Bernd), Hecht C (Hecht, Christian), Stein R (Stein,Rene), Friedrichs P (Friedrichs, Peter) Materials science forum 2006, vol. 527-29 (1), pp. 135-140 附件下载 |
