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SiON high-refractive-index waveguide and planar lightwave circuits [2019-04-19] |
| SiON high-refractive-index waveguide and planar lightwave circuits G.-L. Bona ; R. Germann ; B. J. Offrein Published in: IBM Journal of Research and Development ( Volume: 47 , Issue: 2.3 , March 2003 ) Page(s): 239 - 249 Date of Publication: March 2003 ISSN Information: DOI: 10.1147/rd.472.0239 Publisher: IBM |
