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Etching Profiles at Resist Edges II. Experimental Confirmation of Models Us [2012-05-29] |
| Etching Profiles at Resist Edges II. Experimental Confirmation of Models Using GaAs J. Electrochem. Soc., Volume 133, Issue 6, pp. 1226-1232 (1986) P. H. L. Notten, J. J. Kelly, and H. K. Kuiken Philips Research Laboratories, 5600 JA Eindhoven, The Netherlands 附件下载 |
