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Modeling of leakage mechanisms in sub‐50 nm p+‐n junctions [2019-03-21] |
| Modeling of leakage mechanisms in sub‐50 nm p+‐n junctions Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 14, 236 (1996);https://doi.org/10.1116/1.588454
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