Title: An MEMS Optical Fiber Pressure Sensor Based on a Square Silicon Diaphragm: Numerical Simulation and Experimental Verification

Authors: Li, XJ; Qiu, CJ; Deng, YL; Qu, W; He, JN

Author Full Names: Li, Xue-jin; Qiu, Cheng-jun; Deng, Yuan-long; Qu, Wei; He, Jun-nan

Source: INTERNATIONAL JOURNAL OF NONLINEAR SCIENCES AND NUMERICAL SIMULATION 11 (3): 225-229 MAR 2010