logo logo
首 页 >> 单篇全文
Characterization of threading dislocations in thin germanium layers by defe
[2009-07-14]
Characterization of threading dislocations in thin germanium layers by defect etching: Toward chromium and HF-Free solution
作者: Souriau L (Souriau, L.)1,2, Atanasova T (Atanasova, T.)3, Terzieva V (Terzieva, V.)1, Moussa A (Moussa, A.)1, Caymax M (Caymax, M.)1, Loo R (Loo, R.)1, Meuris M (Meuris, M.)1, Vandervorst W (Vandervorst, W.)1,2
来源出版物: JOURNAL OF THE ELECTROCHEMICAL SOCIETY    卷: 155    期: 9    页: H677-H681    出版年: 2008 

附件下载